PENNING GAUGE – PEG100
The INFICON Penning Gauge PEG100 provides reliable high vacuum measurements. The rugged penning cold cathode sensor has no filament to burn out. Due to titanium cathode plates and the reduced high voltage after plasma ignition, the gauge can be operated also in sputtering applications. The fieldbus options, in addition to the logarithmic analog output signal, allow easy integration into vacuum systems using Profibus DP or DeviceNet protocols.
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