Vacuum gauges

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VACUUM SWITCH – VSC150A

Benefits
  • High switching accuracy (± 0.1 mbar)
  • Stable long term operating characteristics
  • Rugged, corrosion protected design
  • Switching contacts (normally closed) in the reference chamber and thus protected against process media
  • Increased switching capability when using switching amplifier
  • Adapter available for differential pressure measurement

Typical Applications
  • Pressure switch or differential pressure switch to control valves, pumps, power supplies
  • Load lock chambers
  • Process chambers
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VACUUM SWITCH – VSA200 / VSD200

Benefits
  • Corrosion resistant all stainless steel design
  • Robust design, cleanroom compliant
  • Easy installation with setpoints factory preset or field-adjustable
  • IP 44 protection
  • Relay output with potential free contacts
  • High-accuracy temperature compensated sensor
  • Pressure range 1×10-9 mbar … 2 bar

Typical Applications
  • Atmospheric pressure detection for all vacuum applications
  • Pressure interlock (power supplies, gas supplies, pumps, valves, actuators, etc.)
  • Vacuum to high vacuum
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VACUUM SWITCH – VSA100A

Benefits
  • Reliable and budget-priced vacuum switch
  • High life time
  • Rugged design
  • Easy to integrate
  • IP 44 protection

Typical Applications
  • Control of load lock chambers
  • Safety shutdown of vacuum systems
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