LINEAR MOTION FEEDTHROUGH CF

  • With bellows for more demanding vacuum requirements
  • Direct push and pull actuation
  • High accuracy adjustment using micrometer screw
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LINEAR MOTION FEEDTHROUGH CF
Type FPU016-H FPU040-H FPU016-Z FPU040-Z
Article No. 214-330 214-332 214-334 214-336
Vacuum connection DN 16 CF-R DN 40 CF-R DN 16 CF-R DN 40 CF-R
Feedthrough/seal bellow bellow bellow bellow
Shaft connection

Ø

 M4 x 16mm M6 x 10 / 10 x 15mm M4 x 16mm M6 x 10 / 10 x 15mm
Actuator manual manual Micrometer Screw Micrometer Screw
Travel 25 mm 50 mm 20 mm 50 mm
Travel per revolution – – 0,5 mm 1 mm
Scale division 5 mm 10 mm 0,01 mm 0,005 mm
Shaft load

, Radial force at max.

 20 N 100 N 20 N 100 N
Shaft load

Axial, force vacuum

 85 N 140 N 185 N 440 N
Shaft load

Axial, force against atm

 100 N 200 N 200 N 500 N
Shaft load

, Torsion torque

 0,2 Nm 0,5 Nm 0,2 Nm 0,5 Nm
Tightness 1 x 10-10 mbar l/s 1 x 10-10 mbar l/s 1 x 10-10 mbar l/s 1 x 10-10 mbar l/s
Pressure (absolute) 1 x 10-9 mbar – 2 bar 1 x 10-9 mbar – 2 bar 1 x 10-9 mbar – 2 bar 1 x 10-9 mbar – 2 bar
Bakeout temperature in C°, Feedtrough 300°C 300°C 300°C 300°C
Bakeout temperature in C°, Micrometer screw – – 100°C 100°C
Materials exposed to

process media

 Stainless Steel Stainless Steel Stainless Steel Stainless Steel
Weight 0,15 kg 0,75 kg 0,25 kg 1 kg