Vacuum gauges

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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG025D / CDG025D-S

Benefits
  • Fully compatible with CTR 100 transmitters
  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

Typical Applications
  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement
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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG025D-X3

Benefits
  • Fully compatible with CTR 100 transmitters
  • Full scale ranges from 100 mTorr … 1000 Torr
  • Fast stability after power on
  • Fast recovery from atmospheric pressure
  • Corrosion resistant ceramic sensor
  • Excellent long term signal stability
  • Temperature compensated
  • Sensor protected from contamination
  • One pushbutton zero function
  • Wide range power supply

Typical Applications
  • Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD
  • Data storage and display manufacturing equipment
  • Industrial vacuum equipment
  • General high accuracy pressure measurement
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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG045D

Benefits
  • Fully compatible with CTR 101 transmitters
  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications
  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG100D

Benefits
  • Fully compatible with CTR 101 transmitters
  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications
  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG160D / CDG200D

Benefits
  • Fully compatible with CTR 101 transmitters
  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications
  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
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BAYARD-ALPERT PIRANI GAUGE – BPG400

Benefits
  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical Applications
  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range
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BAYARD-ALPERT PIRANI GAUGE – BPG402-S

Benefits
  • Extremely wide measurement range from 5×10-10 mbar to atmosphere (3.8×10-10 Torr to atmosphere)
  • Excellent repeatability in the process pressure range from 10-8 … 10-2 mbar of 5%
  • The Pirani interlock protects the Bayard-Alpert system from premature filament burnout and excess contamination from high pressure operation
  • Long-life yttrium oxide coated iridium filament
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance
  • General vacuum measurement and control in the low to ultra high vacuum range

Typical Applications
  • Pressure measurement in semiconductor process and transfer chambers
  • Industrial coating
  • General vacuum measurement and control in the low to ultra high vacuum range
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HIGH PRESSURE HOT IONIZATION GAUGE – HPG400

Benefits
  • HPG400 saves cost and tool space and reduces the complexity of vacuum system installation and setup
  • The high pressure hot ion gauge delivers accurate, reliable pressure measurements from 1×10-5 … 1 mbar for improved process control
  • User selectable hot ion emission activation between 5×10-2 and 1 mbar
  • Pirani interlock protects the hot filament from premature burnout
  • Optional graphic display and Fieldbus interfaces available
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • RoHS compliance

Typical Applications
  • Sputter applications in semiconductor manufacturing, electronics and media industry
  • Industrial coating
  • General vacuum measurement and control in the low to high vacuum range
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BAYARD-ALPERT PIRANI CAPACITANCE DIAPHGRAPM GAUGE – TripleGauge®BCG450

Benefits
  • BCG450 saves cost and tool space and reduces the complexity of vacuum measurement installation and setup
  • Gas-type-independent pressure measurement above 10 Torr provides more reliable loadlock control for any gas mixture
  • Pirani interlock protects the hot filament from premature burnout
  • Automatic high vacuum Pirani adjustment reduces operator interventions
  • Differential pressure measurement at atmosphere eliminates uncertainty related to atmospheric pressure changes
  • Easy-to-exchange sensing element with on-board calibration data guarantees reproducibility
  • Optional graphic display and Fieldbus interfaces available
  • RoHS compliance
Typical Applications
  • Pressure measurement in Semiconductor process, transfer and loadlock chambers
  • Industrial coating
  • General vacuum measurement and control on systems in the low to ultra high vacuum range
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PIRANI STANDARD GAUGE – PSG500/-S/PSG502-S/PSG510-5/PSG512-S

Benefits
  • Easy push button ATM and HV adjustment
  • Space saving rugged design
  • Aluminum housing
  • Mounts in any orientation
  • Stainless steel measuring cell with metal-sealed feedthrough
  • Logarithmic signal output for easy integration
  • 10 bar absolute overpressure with threaded connections
  • 250 °C bakeable version
  • Nickel filament option for corrosive applications
  • Ceramic feedthrough for extremely corrosive applications (PSG510 & PSG512)
  • Optional setpoints
  • RoHS compliance

Typical Applications
  • Controlling high vacuum ionization gauges
  • Fore vacuum pressure monitoring
  • Safety circuits in vacuum systems
  • General vacuum measurement and control in the fine and rough vacuum range
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