ROTARY / LINEAR MOTION FEEDTHROUGH ISO-KF | |||
Type | FCH016-H | FCH025-H | FCH040-H |
Article No. Feedthroughs | 214-320 | 214-322 | 214-324 |
Article No. Sliding feedthrough | 214-072 | 214-073 | 214-074 |
Vacuum connection | DN 16 ISO-KF | DN 25 ISO-KF | DN 40 ISO-KF |
Feedthrough/seal | FPM | FPM | FPM |
Shaft connection
Ø |
M3 / 5 mm | M4 / 8 mm | M 6 / 12mm |
Travel | 50 mm | 100 mm | 150 mm |
Shaft load, Radial force at max.travel | 10 N | 15 N | 30 N |
Shaft load
, Torsion torque |
2 Nm | 8 Nm | 20 Nm |
Tightness, static | 1 x 10-9 mbar l/s | 1 x 10-9 mbar l/s | 1 x 10-9 mbar l/s |
Pressure (absolute) | 1 x 10-8 mbar – 1 bar | 1 x 10-8 mbar – 1 bar | 1 x 10-8 mbar – 1 bar |
Operating temperature | 50°C | 50°C | 50°C |
Bakeout temperature | 110°C | 110°C | 110°C |
Materials exposed to process
media |
stainless steel
304/1.4301, aluminum 6082 |
stainless steel
304/1.4301, aluminum 6082 |
stainless steel
304/1.4301, aluminum 6082 |
Weight | 0,1 kg | 0,2 kg | 0,3 kg |
ROTARY / LINEAR MOTION FEEDTHROUGH ISO-KF
- Two FPM shaft seals
- Direct push/pull and rotary actuation
- With locking ring and optional anti-rotation device