Valves

 

COARSE GAS DOSING VALVE, MANUALLY ACTUATED

  • For admitting a reproducible flow of gas into a vacuum chamber

Accessories
  • Seal set
 

DOSING AND SHUT-OFF VALVE, MANUALLY ACTUATED

Benefits
  • very wide control range
  • Optimal control characteristics
  • Digital display
  • Excellent reproducibility
  • Integrated shut-off valve

Accessories
  • Filter, vacuum side 590 mbar l/s
  • Filter, vacuum side 1250 mbar l/s
 

ALL-METAL DOSING VALVE

Benefits
  • Minimal dead volume
  • Controlled routing of the gas flow using capillaries
  • Operating temperature 200°C

Accessories
  • Capillary complete, vacuum side, 1m
  • Heater
  • Reducing flang DN40/16 CF
  • Valve plate, sapphire
  • Valve seat standard / gold plated