SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG160D / CDG200D

Benefits
  • Fully compatible with CTR 101 transmitters
  • Lower CoO (cost of ownership), 50% faster warm up, energy efficient low power consumption
  • Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points
  • Easy one push button or remote signal zero command, zero offset adjustable
  • Diagnostic port for quick service and maintenance
  • Two year warranty, longer life time with advanced heating concept and gauge protection
  • No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications
  • Compliance & standards: CE, EN, UL, SEMI, RoHS

Typical Applications
  • Etch, CVD, PVD and other semiconductor production processes
  • Chemical and corrosive vacuum processes
  • General thin film and vacuum processes
  • Reference sensor for monitoring of test instruments according to international standards
  • Transfer standard for traceability measurements
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SKY® CAPACITANCE DIAPHRAGM GAUGE – CDG160D / CDG200D
INFICON SKY CDG160D and CDG200D high temperature manometers are your best choice for accurate total pressure measurement and control. CDG160D and CDG200D- gauges are temperature controlled at 160 / 200 °C for superior performance in demanding semiconductor and plasma processes. They are available for full scale ranges from 1 Torr to 1000 Torr, with all common flange types and fieldbus interfaces and provide a linear 0 to 10 V, gas type independent, pressure signal. INFICON capacitance manometers use an ultra pure alumina ceramic diaphragm which is corrosion proof. The advantages of the ceramic sensor are better signal stability, faster recovery from atmosphere, short warm up time and an extraordinary lifetime. INFICON CDG are high quality, cost effective pressure sensors for demanding semiconductor, plasma and vacuum applications.
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