| ROTARY / LINEAR MOTION FEEDTHROUGH ISO-KF | |||
| Type | FCH016-H | FCH025-H | FCH040-H |
| Article No. Feedthroughs | 214-320 | 214-322 | 214-324 |
| Article No. Sliding feedthrough | 214-072 | 214-073 | 214-074 |
| Vacuum connection | DN 16 ISO-KF | DN 25 ISO-KF | DN 40 ISO-KF |
| Feedthrough/seal | FPM | FPM | FPM |
| Shaft connection
Ø |
M3 / 5 mm | M4 / 8 mm | M 6 / 12mm |
| Travel | 50 mm | 100 mm | 150 mm |
| Shaft load, Radial force at max.travel | 10 N | 15 N | 30 N |
| Shaft load
, Torsion torque |
2 Nm | 8 Nm | 20 Nm |
| Tightness, static | 1 x 10-9 mbar l/s | 1 x 10-9 mbar l/s | 1 x 10-9 mbar l/s |
| Pressure (absolute) | 1 x 10-8 mbar – 1 bar | 1 x 10-8 mbar – 1 bar | 1 x 10-8 mbar – 1 bar |
| Operating temperature | 50°C | 50°C | 50°C |
| Bakeout temperature | 110°C | 110°C | 110°C |
| Materials exposed to process
media |
stainless steel
304/1.4301, aluminum 6082 |
stainless steel
304/1.4301, aluminum 6082 |
stainless steel
304/1.4301, aluminum 6082 |
| Weight | 0,1 kg | 0,2 kg | 0,3 kg |
ROTARY / LINEAR MOTION FEEDTHROUGH ISO-KF
- Two FPM shaft seals
- Direct push/pull and rotary actuation
- With locking ring and optional anti-rotation device